3/14/2011	9:33:59 AM	Recipe started at 9:33 AM
3/14/2011	9:33:59 AM	Helium valve closed
3/14/2011	9:33:59 AM	H2 valve closed
3/14/2011	9:33:59 AM	BCl3 valve closed
3/14/2011	9:33:59 AM	PH3 valve closed
3/14/2011	9:33:59 AM	SiCl4 pre valve closed
3/14/2011	9:33:59 AM	SiCl4 post valve closed
3/14/2011	9:33:59 AM	Main Vac valve closed
3/14/2011	9:33:59 AM	Bubbler valve closed
3/14/2011	9:33:59 AM	Bypass valve opened
3/14/2011	9:33:59 AM	Helium MFC set to  0.000000
3/14/2011	9:33:59 AM	H2 MFC set to  0.000000
3/14/2011	9:33:59 AM	BCl3 MFC set to  0.000000
3/14/2011	9:33:59 AM	PHl3 MFC set to  0.000000
3/14/2011	9:33:59 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:33:59 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:33:59 AM	Tube furnace set to 100
3/14/2011	9:33:59 AM	Helium valve closed
3/14/2011	9:33:59 AM	H2 valve closed
3/14/2011	9:33:59 AM	BCl3 valve closed
3/14/2011	9:33:59 AM	PH3 valve closed
3/14/2011	9:33:59 AM	SiCl4 pre valve closed
3/14/2011	9:33:59 AM	SiCl4 post valve closed
3/14/2011	9:33:59 AM	Bubbler valve closed
3/14/2011	9:33:59 AM	Main Vac valve opened
3/14/2011	9:33:59 AM	Bypass valve opened
3/14/2011	9:33:59 AM	Helium MFC set to  0.000000
3/14/2011	9:33:59 AM	H2 MFC set to  0.000000
3/14/2011	9:33:59 AM	BCl3 MFC set to  0.000000
3/14/2011	9:33:59 AM	PHl3 MFC set to  0.000000
3/14/2011	9:33:59 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:33:59 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:33:59 AM	Tube furnace set to 100
3/14/2011	9:34:05 AM	H2 valve closed
3/14/2011	9:34:05 AM	BCl3 valve closed
3/14/2011	9:34:05 AM	PH3 valve closed
3/14/2011	9:34:05 AM	SiCl4 pre valve closed
3/14/2011	9:34:05 AM	SiCl4 post valve closed
3/14/2011	9:34:05 AM	Main Vac valve closed
3/14/2011	9:34:05 AM	Bypass valve closed
3/14/2011	9:34:05 AM	Bubbler valve closed
3/14/2011	9:34:05 AM	Helium valve opened
3/14/2011	9:34:05 AM	Helium MFC set to  400.000000
3/14/2011	9:34:05 AM	H2 MFC set to  0.000000
3/14/2011	9:34:05 AM	BCl3 MFC set to  0.000000
3/14/2011	9:34:05 AM	PHl3 MFC set to  0.000000
3/14/2011	9:34:05 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:34:05 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:34:05 AM	Tube furnace set to 200
3/14/2011	9:35:45 AM	H2 valve closed
3/14/2011	9:35:45 AM	BCl3 valve closed
3/14/2011	9:35:45 AM	PH3 valve closed
3/14/2011	9:35:45 AM	SiCl4 pre valve closed
3/14/2011	9:35:45 AM	SiCl4 post valve closed
3/14/2011	9:35:45 AM	Main Vac valve closed
3/14/2011	9:35:45 AM	Bypass valve closed
3/14/2011	9:35:45 AM	Helium valve opened
3/14/2011	9:35:45 AM	Bubbler valve opened
3/14/2011	9:35:45 AM	Helium MFC set to  400.000000
3/14/2011	9:35:45 AM	H2 MFC set to  0.000000
3/14/2011	9:35:45 AM	BCl3 MFC set to  0.000000
3/14/2011	9:35:45 AM	PHl3 MFC set to  0.000000
3/14/2011	9:35:45 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:35:45 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:35:45 AM	Tube furnace set to 200
3/14/2011	9:36:45 AM	Helium valve closed
3/14/2011	9:36:45 AM	H2 valve closed
3/14/2011	9:36:45 AM	BCl3 valve closed
3/14/2011	9:36:45 AM	PH3 valve closed
3/14/2011	9:36:45 AM	SiCl4 pre valve closed
3/14/2011	9:36:45 AM	SiCl4 post valve closed
3/14/2011	9:36:45 AM	Main Vac valve closed
3/14/2011	9:36:45 AM	Bypass valve closed
3/14/2011	9:36:45 AM	Bubbler valve closed
3/14/2011	9:36:45 AM	Helium MFC set to  0.000000
3/14/2011	9:36:45 AM	H2 MFC set to  0.000000
3/14/2011	9:36:45 AM	BCl3 MFC set to  0.000000
3/14/2011	9:36:45 AM	PHl3 MFC set to  0.000000
3/14/2011	9:36:45 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:36:45 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:36:45 AM	Tube furnace set to 100
3/14/2011	9:37:15 AM	Helium valve closed
3/14/2011	9:37:15 AM	H2 valve closed
3/14/2011	9:37:15 AM	BCl3 valve closed
3/14/2011	9:37:16 AM	PH3 valve closed
3/14/2011	9:37:16 AM	SiCl4 pre valve closed
3/14/2011	9:37:16 AM	SiCl4 post valve closed
3/14/2011	9:37:16 AM	Main Vac valve closed
3/14/2011	9:37:16 AM	Bubbler valve closed
3/14/2011	9:37:16 AM	Bypass valve opened
3/14/2011	9:37:16 AM	Helium MFC set to  0.000000
3/14/2011	9:37:16 AM	H2 MFC set to  0.000000
3/14/2011	9:37:16 AM	BCl3 MFC set to  0.000000
3/14/2011	9:37:16 AM	PHl3 MFC set to  0.000000
3/14/2011	9:37:16 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:37:16 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:37:16 AM	Tube furnace set to 100
3/14/2011	9:37:35 AM	Helium valve closed
3/14/2011	9:37:35 AM	H2 valve closed
3/14/2011	9:37:35 AM	BCl3 valve closed
3/14/2011	9:37:35 AM	PH3 valve closed
3/14/2011	9:37:35 AM	SiCl4 pre valve closed
3/14/2011	9:37:35 AM	SiCl4 post valve closed
3/14/2011	9:37:35 AM	Bubbler valve closed
3/14/2011	9:37:35 AM	Main Vac valve opened
3/14/2011	9:37:35 AM	Bypass valve opened
3/14/2011	9:37:35 AM	Helium MFC set to  0.000000
3/14/2011	9:37:35 AM	H2 MFC set to  0.000000
3/14/2011	9:37:35 AM	BCl3 MFC set to  0.000000
3/14/2011	9:37:35 AM	PHl3 MFC set to  0.000000
3/14/2011	9:37:35 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:37:35 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:37:36 AM	Tube furnace set to 100
3/14/2011	9:37:37 AM	Run finished at 9:37 AM
3/14/2011	9:41:19 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	9:41:20 AM	Recipe started at 9:41 AM
3/14/2011	9:41:20 AM	H2 valve closed
3/14/2011	9:41:20 AM	BCl3 valve closed
3/14/2011	9:41:20 AM	PH3 valve closed
3/14/2011	9:41:20 AM	SiCl4 pre valve closed
3/14/2011	9:41:20 AM	SiCl4 post valve closed
3/14/2011	9:41:20 AM	Main Vac valve closed
3/14/2011	9:41:20 AM	Bypass valve closed
3/14/2011	9:41:20 AM	Bubbler valve closed
3/14/2011	9:41:20 AM	Helium valve opened
3/14/2011	9:41:20 AM	Helium MFC set to  500.000000
3/14/2011	9:41:20 AM	H2 MFC set to  0.000000
3/14/2011	9:41:20 AM	BCl3 MFC set to  0.000000
3/14/2011	9:41:20 AM	PHl3 MFC set to  0.000000
3/14/2011	9:41:20 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:41:20 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:41:20 AM	Tube furnace set to 0
3/14/2011	9:42:34 AM	Helium valve closed
3/14/2011	9:42:34 AM	H2 valve closed
3/14/2011	9:42:34 AM	BCl3 valve closed
3/14/2011	9:42:34 AM	PH3 valve closed
3/14/2011	9:42:34 AM	SiCl4 pre valve closed
3/14/2011	9:42:34 AM	SiCl4 post valve closed
3/14/2011	9:42:34 AM	Main Vac valve closed
3/14/2011	9:42:34 AM	Bypass valve closed
3/14/2011	9:42:34 AM	Bubbler valve closed
3/14/2011	9:42:34 AM	Helium MFC set to  0.000000
3/14/2011	9:42:34 AM	H2 MFC set to  0.000000
3/14/2011	9:42:34 AM	BCl3 MFC set to  0.000000
3/14/2011	9:42:34 AM	PHl3 MFC set to  0.000000
3/14/2011	9:42:34 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:42:34 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:42:35 AM	Tube furnace set to 0
3/14/2011	9:42:35 AM	Run finished at 9:42 AM
3/14/2011	9:42:35 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	9:44:03 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	9:44:03 AM	Recipe started at 9:44 AM
3/14/2011	9:44:03 AM	Helium valve closed
3/14/2011	9:44:03 AM	H2 valve closed
3/14/2011	9:44:03 AM	BCl3 valve closed
3/14/2011	9:44:03 AM	PH3 valve closed
3/14/2011	9:44:03 AM	SiCl4 pre valve closed
3/14/2011	9:44:03 AM	SiCl4 post valve closed
3/14/2011	9:44:03 AM	Main Vac valve closed
3/14/2011	9:44:03 AM	Bubbler valve closed
3/14/2011	9:44:03 AM	Bypass valve opened
3/14/2011	9:44:03 AM	Helium MFC set to  0.000000
3/14/2011	9:44:03 AM	H2 MFC set to  0.000000
3/14/2011	9:44:03 AM	BCl3 MFC set to  0.000000
3/14/2011	9:44:03 AM	PHl3 MFC set to  0.000000
3/14/2011	9:44:03 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:44:03 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:44:03 AM	Tube furnace set to 0
3/14/2011	9:44:33 AM	Helium valve closed
3/14/2011	9:44:33 AM	H2 valve closed
3/14/2011	9:44:33 AM	BCl3 valve closed
3/14/2011	9:44:33 AM	PH3 valve closed
3/14/2011	9:44:33 AM	SiCl4 pre valve closed
3/14/2011	9:44:33 AM	SiCl4 post valve closed
3/14/2011	9:44:33 AM	Bubbler valve closed
3/14/2011	9:44:33 AM	Main Vac valve opened
3/14/2011	9:44:33 AM	Bypass valve opened
3/14/2011	9:44:33 AM	Helium MFC set to  0.000000
3/14/2011	9:44:33 AM	H2 MFC set to  0.000000
3/14/2011	9:44:33 AM	BCl3 MFC set to  0.000000
3/14/2011	9:44:33 AM	PHl3 MFC set to  0.000000
3/14/2011	9:44:33 AM	SiCl4 MFC set to  0.000000
3/14/2011	9:44:33 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:44:33 AM	Tube furnace set to 0
3/14/2011	9:44:33 AM	Run finished at 9:44 AM
3/14/2011	9:44:33 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	9:45:09 AM	Helium MFC set to  50.000000
3/14/2011	9:45:10 AM	Helium valve opened
3/14/2011	9:45:12 AM	Bypass valve closed
3/14/2011	9:45:28 AM	Helium valve closed
3/14/2011	9:45:53 AM	Helium valve opened
3/14/2011	9:47:10 AM	Helium valve closed
3/14/2011	9:47:44 AM	Helium valve opened
3/14/2011	9:49:37 AM	Helium valve closed
3/14/2011	9:49:43 AM	Bypass valve opened
3/14/2011	9:50:19 AM	Helium valve opened
3/14/2011	9:50:20 AM	Bypass valve closed
3/14/2011	9:51:52 AM	Helium valve closed
3/14/2011	9:53:20 AM	Helium valve opened
3/14/2011	9:56:21 AM	Helium valve closed
3/14/2011	9:56:29 AM	Bypass valve opened
3/14/2011	9:57:19 AM	Helium valve opened
3/14/2011	9:58:08 AM	Helium valve closed
3/14/2011	9:58:10 AM	Helium MFC set to  0.000000
3/14/2011	9:58:52 AM	Bypass valve closed
3/14/2011	9:58:55 AM	Main Vac valve closed
3/14/2011	9:59:08 AM	Main Vac valve opened
3/14/2011	9:59:15 AM	Helium MFC set to  40.000000
3/14/2011	9:59:15 AM	Helium valve opened
3/14/2011	9:59:50 AM	Helium MFC set to  0.000000
3/14/2011	9:59:51 AM	Helium valve closed
3/14/2011	9:59:52 AM	Bypass valve opened
3/14/2011	10:00:50 AM	Recipe started at 10:00 AM
3/14/2011	10:00:50 AM	Helium valve closed
3/14/2011	10:00:50 AM	BCl3 valve closed
3/14/2011	10:00:50 AM	PH3 valve closed
3/14/2011	10:00:50 AM	SiCl4 pre valve closed
3/14/2011	10:00:50 AM	SiCl4 post valve closed
3/14/2011	10:00:50 AM	Main Vac valve closed
3/14/2011	10:00:50 AM	Bypass valve closed
3/14/2011	10:00:50 AM	Bubbler valve closed
3/14/2011	10:00:50 AM	H2 valve opened
3/14/2011	10:00:50 AM	Helium MFC set to  0.000000
3/14/2011	10:00:50 AM	H2 MFC set to  500.000000
3/14/2011	10:00:50 AM	BCl3 MFC set to  0.000000
3/14/2011	10:00:50 AM	PHl3 MFC set to  0.000000
3/14/2011	10:00:50 AM	SiCl4 MFC set to  0.000000
3/14/2011	10:00:50 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:00:50 AM	Tube furnace set to 200
3/14/2011	10:02:09 AM	Helium valve closed
3/14/2011	10:02:09 AM	BCl3 valve closed
3/14/2011	10:02:09 AM	PH3 valve closed
3/14/2011	10:02:09 AM	SiCl4 pre valve closed
3/14/2011	10:02:09 AM	SiCl4 post valve closed
3/14/2011	10:02:09 AM	Main Vac valve closed
3/14/2011	10:02:09 AM	Bypass valve closed
3/14/2011	10:02:09 AM	H2 valve opened
3/14/2011	10:02:09 AM	Bubbler valve opened
3/14/2011	10:02:09 AM	Helium MFC set to  0.000000
3/14/2011	10:02:09 AM	H2 MFC set to  400.000000
3/14/2011	10:02:09 AM	BCl3 MFC set to  0.000000
3/14/2011	10:02:09 AM	PHl3 MFC set to  0.000000
3/14/2011	10:02:09 AM	SiCl4 MFC set to  0.000000
3/14/2011	10:02:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:02:09 AM	Tube furnace set to 1001
3/14/2011	10:20:09 AM	Helium valve closed
3/14/2011	10:20:09 AM	BCl3 valve closed
3/14/2011	10:20:09 AM	PH3 valve closed
3/14/2011	10:20:09 AM	SiCl4 pre valve closed
3/14/2011	10:20:09 AM	SiCl4 post valve closed
3/14/2011	10:20:09 AM	Main Vac valve closed
3/14/2011	10:20:09 AM	Bypass valve closed
3/14/2011	10:20:09 AM	H2 valve opened
3/14/2011	10:20:09 AM	Bubbler valve opened
3/14/2011	10:20:09 AM	Helium MFC set to  0.000000
3/14/2011	10:20:09 AM	H2 MFC set to  400.000000
3/14/2011	10:20:09 AM	BCl3 MFC set to  0.000000
3/14/2011	10:20:09 AM	PHl3 MFC set to  0.000000
3/14/2011	10:20:09 AM	SiCl4 MFC set to  0.000000
3/14/2011	10:20:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:20:09 AM	Tube furnace set to 1000
3/14/2011	10:24:09 AM	Helium valve closed
3/14/2011	10:24:09 AM	PH3 valve closed
3/14/2011	10:24:09 AM	Main Vac valve closed
3/14/2011	10:24:09 AM	Bypass valve closed
3/14/2011	10:24:09 AM	H2 valve opened
3/14/2011	10:24:09 AM	BCl3 valve opened
3/14/2011	10:24:09 AM	SiCl4 pre valve opened
3/14/2011	10:24:09 AM	SiCl4 post valve opened
3/14/2011	10:24:09 AM	Bubbler valve opened
3/14/2011	10:24:09 AM	Helium MFC set to  0.000000
3/14/2011	10:24:09 AM	H2 MFC set to  490.000000
3/14/2011	10:24:09 AM	BCl3 MFC set to  3.500000
3/14/2011	10:24:09 AM	PHl3 MFC set to  0.000000
3/14/2011	10:24:09 AM	SiCl4 MFC set to  51.000000
3/14/2011	10:24:09 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:24:10 AM	Tube furnace set to 1000
3/14/2011	10:41:10 AM	Helium valve closed
3/14/2011	10:41:10 AM	BCl3 valve closed
3/14/2011	10:41:10 AM	PH3 valve closed
3/14/2011	10:41:10 AM	SiCl4 pre valve closed
3/14/2011	10:41:10 AM	SiCl4 post valve closed
3/14/2011	10:41:10 AM	Main Vac valve closed
3/14/2011	10:41:10 AM	Bypass valve closed
3/14/2011	10:41:10 AM	H2 valve opened
3/14/2011	10:41:10 AM	Bubbler valve opened
3/14/2011	10:41:10 AM	Helium MFC set to  0.000000
3/14/2011	10:41:10 AM	H2 MFC set to  500.000000
3/14/2011	10:41:10 AM	BCl3 MFC set to  0.000000
3/14/2011	10:41:10 AM	PHl3 MFC set to  0.000000
3/14/2011	10:41:10 AM	SiCl4 MFC set to  0.000000
3/14/2011	10:41:10 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:41:10 AM	Tube furnace set to 0
3/14/2011	10:43:59 AM	H2 valve closed
3/14/2011	10:43:59 AM	BCl3 valve closed
3/14/2011	10:43:59 AM	PH3 valve closed
3/14/2011	10:43:59 AM	SiCl4 pre valve closed
3/14/2011	10:43:59 AM	SiCl4 post valve closed
3/14/2011	10:43:59 AM	Main Vac valve closed
3/14/2011	10:43:59 AM	Bypass valve closed
3/14/2011	10:43:59 AM	Helium valve opened
3/14/2011	10:43:59 AM	Bubbler valve opened
3/14/2011	10:43:59 AM	Helium MFC set to  400.000000
3/14/2011	10:43:59 AM	H2 MFC set to  0.000000
3/14/2011	10:43:59 AM	BCl3 MFC set to  0.000000
3/14/2011	10:43:59 AM	PHl3 MFC set to  0.000000
3/14/2011	10:43:59 AM	SiCl4 MFC set to  0.000000
3/14/2011	10:43:59 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:43:59 AM	Tube furnace set to 0
3/14/2011	11:03:59 AM	Helium valve closed
3/14/2011	11:03:59 AM	H2 valve closed
3/14/2011	11:03:59 AM	BCl3 valve closed
3/14/2011	11:03:59 AM	PH3 valve closed
3/14/2011	11:03:59 AM	SiCl4 pre valve closed
3/14/2011	11:03:59 AM	SiCl4 post valve closed
3/14/2011	11:03:59 AM	Main Vac valve closed
3/14/2011	11:03:59 AM	Bypass valve closed
3/14/2011	11:03:59 AM	Bubbler valve closed
3/14/2011	11:03:59 AM	Helium MFC set to  0.000000
3/14/2011	11:03:59 AM	H2 MFC set to  0.000000
3/14/2011	11:03:59 AM	BCl3 MFC set to  0.000000
3/14/2011	11:03:59 AM	PHl3 MFC set to  0.000000
3/14/2011	11:03:59 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:03:59 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:03:59 AM	Tube furnace set to 0
3/14/2011	11:03:59 AM	Run finished at 11:03 AM
3/14/2011	11:12:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	11:12:49 AM	Recipe started at 11:12 AM
3/14/2011	11:12:49 AM	H2 valve closed
3/14/2011	11:12:49 AM	BCl3 valve closed
3/14/2011	11:12:49 AM	PH3 valve closed
3/14/2011	11:12:49 AM	SiCl4 pre valve closed
3/14/2011	11:12:49 AM	SiCl4 post valve closed
3/14/2011	11:12:49 AM	Main Vac valve closed
3/14/2011	11:12:49 AM	Bypass valve closed
3/14/2011	11:12:49 AM	Bubbler valve closed
3/14/2011	11:12:49 AM	Helium valve opened
3/14/2011	11:12:49 AM	Helium MFC set to  500.000000
3/14/2011	11:12:49 AM	H2 MFC set to  0.000000
3/14/2011	11:12:49 AM	BCl3 MFC set to  0.000000
3/14/2011	11:12:49 AM	PHl3 MFC set to  0.000000
3/14/2011	11:12:49 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:12:49 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:12:49 AM	Tube furnace set to 0
3/14/2011	11:12:53 AM	Helium valve closed
3/14/2011	11:12:53 AM	H2 valve closed
3/14/2011	11:12:53 AM	BCl3 valve closed
3/14/2011	11:12:53 AM	PH3 valve closed
3/14/2011	11:12:53 AM	SiCl4 pre valve closed
3/14/2011	11:12:53 AM	SiCl4 post valve closed
3/14/2011	11:12:53 AM	Main Vac valve closed
3/14/2011	11:12:53 AM	Bypass valve closed
3/14/2011	11:12:53 AM	Bubbler valve closed
3/14/2011	11:12:53 AM	Helium MFC set to  0.000000
3/14/2011	11:12:53 AM	H2 MFC set to  0.000000
3/14/2011	11:12:53 AM	BCl3 MFC set to  0.000000
3/14/2011	11:12:53 AM	PHl3 MFC set to  0.000000
3/14/2011	11:12:53 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:12:53 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:12:53 AM	Tube furnace set to 0
3/14/2011	11:12:53 AM	Run finished at 11:12 AM
3/14/2011	11:12:53 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	11:18:12 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	11:18:13 AM	Recipe started at 11:18 AM
3/14/2011	11:18:13 AM	Helium valve closed
3/14/2011	11:18:13 AM	H2 valve closed
3/14/2011	11:18:13 AM	BCl3 valve closed
3/14/2011	11:18:13 AM	PH3 valve closed
3/14/2011	11:18:13 AM	SiCl4 pre valve closed
3/14/2011	11:18:13 AM	SiCl4 post valve closed
3/14/2011	11:18:13 AM	Main Vac valve closed
3/14/2011	11:18:13 AM	Bubbler valve closed
3/14/2011	11:18:13 AM	Bypass valve opened
3/14/2011	11:18:13 AM	Helium MFC set to  0.000000
3/14/2011	11:18:13 AM	H2 MFC set to  0.000000
3/14/2011	11:18:13 AM	BCl3 MFC set to  0.000000
3/14/2011	11:18:13 AM	PHl3 MFC set to  0.000000
3/14/2011	11:18:13 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:18:13 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:18:13 AM	Tube furnace set to 0
3/14/2011	11:18:41 AM	Helium valve closed
3/14/2011	11:18:41 AM	H2 valve closed
3/14/2011	11:18:41 AM	BCl3 valve closed
3/14/2011	11:18:41 AM	PH3 valve closed
3/14/2011	11:18:41 AM	SiCl4 pre valve closed
3/14/2011	11:18:41 AM	SiCl4 post valve closed
3/14/2011	11:18:41 AM	Bubbler valve closed
3/14/2011	11:18:41 AM	Main Vac valve opened
3/14/2011	11:18:41 AM	Bypass valve opened
3/14/2011	11:18:41 AM	Helium MFC set to  0.000000
3/14/2011	11:18:41 AM	H2 MFC set to  0.000000
3/14/2011	11:18:41 AM	BCl3 MFC set to  0.000000
3/14/2011	11:18:41 AM	PHl3 MFC set to  0.000000
3/14/2011	11:18:41 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:18:41 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:18:41 AM	Tube furnace set to 0
3/14/2011	11:18:41 AM	Run finished at 11:18 AM
3/14/2011	11:18:41 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	11:18:43 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/14/2011	11:18:55 AM	Recipe started at 11:18 AM
3/14/2011	11:18:55 AM	Helium valve closed
3/14/2011	11:18:55 AM	H2 valve closed
3/14/2011	11:18:55 AM	BCl3 valve closed
3/14/2011	11:18:55 AM	PH3 valve closed
3/14/2011	11:18:55 AM	SiCl4 pre valve closed
3/14/2011	11:18:55 AM	SiCl4 post valve closed
3/14/2011	11:18:55 AM	Main Vac valve closed
3/14/2011	11:18:55 AM	Bubbler valve closed
3/14/2011	11:18:55 AM	Bypass valve opened
3/14/2011	11:18:55 AM	Helium MFC set to  0.000000
3/14/2011	11:18:55 AM	H2 MFC set to  0.000000
3/14/2011	11:18:55 AM	BCl3 MFC set to  0.000000
3/14/2011	11:18:55 AM	PHl3 MFC set to  0.000000
3/14/2011	11:18:55 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:18:55 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:18:55 AM	Tube furnace set to 0
3/14/2011	11:18:56 AM	Helium valve closed
3/14/2011	11:18:56 AM	H2 valve closed
3/14/2011	11:18:56 AM	BCl3 valve closed
3/14/2011	11:18:56 AM	PH3 valve closed
3/14/2011	11:18:56 AM	SiCl4 pre valve closed
3/14/2011	11:18:56 AM	SiCl4 post valve closed
3/14/2011	11:18:56 AM	Bubbler valve closed
3/14/2011	11:18:56 AM	Main Vac valve opened
3/14/2011	11:18:56 AM	Bypass valve opened
3/14/2011	11:18:56 AM	Helium MFC set to  0.000000
3/14/2011	11:18:56 AM	H2 MFC set to  0.000000
3/14/2011	11:18:56 AM	BCl3 MFC set to  0.000000
3/14/2011	11:18:56 AM	PHl3 MFC set to  0.000000
3/14/2011	11:18:56 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:18:56 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:18:56 AM	Tube furnace set to 0
3/14/2011	11:19:56 AM	H2 valve closed
3/14/2011	11:19:56 AM	BCl3 valve closed
3/14/2011	11:19:56 AM	PH3 valve closed
3/14/2011	11:19:56 AM	SiCl4 pre valve closed
3/14/2011	11:19:56 AM	SiCl4 post valve closed
3/14/2011	11:19:56 AM	Bubbler valve closed
3/14/2011	11:19:56 AM	Helium valve opened
3/14/2011	11:19:56 AM	Main Vac valve opened
3/14/2011	11:19:56 AM	Bypass valve opened
3/14/2011	11:19:56 AM	Helium MFC set to  100.000000
3/14/2011	11:19:56 AM	H2 MFC set to  0.000000
3/14/2011	11:19:56 AM	BCl3 MFC set to  0.000000
3/14/2011	11:19:56 AM	PHl3 MFC set to  0.000000
3/14/2011	11:19:56 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:19:56 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:19:56 AM	Tube furnace set to 0
3/14/2011	11:20:56 AM	Helium valve closed
3/14/2011	11:20:56 AM	H2 valve closed
3/14/2011	11:20:56 AM	BCl3 valve closed
3/14/2011	11:20:56 AM	PH3 valve closed
3/14/2011	11:20:56 AM	SiCl4 pre valve closed
3/14/2011	11:20:56 AM	SiCl4 post valve closed
3/14/2011	11:20:56 AM	Bubbler valve closed
3/14/2011	11:20:56 AM	Main Vac valve opened
3/14/2011	11:20:56 AM	Bypass valve opened
3/14/2011	11:20:56 AM	Helium MFC set to  0.000000
3/14/2011	11:20:56 AM	H2 MFC set to  0.000000
3/14/2011	11:20:56 AM	BCl3 MFC set to  0.000000
3/14/2011	11:20:56 AM	PHl3 MFC set to  0.000000
3/14/2011	11:20:56 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:20:56 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:20:56 AM	Tube furnace set to 0
3/14/2011	11:21:56 AM	H2 valve closed
3/14/2011	11:21:56 AM	BCl3 valve closed
3/14/2011	11:21:56 AM	PH3 valve closed
3/14/2011	11:21:56 AM	SiCl4 pre valve closed
3/14/2011	11:21:56 AM	SiCl4 post valve closed
3/14/2011	11:21:56 AM	Bubbler valve closed
3/14/2011	11:21:56 AM	Helium valve opened
3/14/2011	11:21:56 AM	Main Vac valve opened
3/14/2011	11:21:56 AM	Bypass valve opened
3/14/2011	11:21:56 AM	Helium MFC set to  100.000000
3/14/2011	11:21:56 AM	H2 MFC set to  0.000000
3/14/2011	11:21:56 AM	BCl3 MFC set to  0.000000
3/14/2011	11:21:56 AM	PHl3 MFC set to  0.000000
3/14/2011	11:21:56 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:21:56 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:21:56 AM	Tube furnace set to 0
3/14/2011	11:22:57 AM	Helium valve closed
3/14/2011	11:22:57 AM	H2 valve closed
3/14/2011	11:22:57 AM	BCl3 valve closed
3/14/2011	11:22:57 AM	PH3 valve closed
3/14/2011	11:22:57 AM	SiCl4 pre valve closed
3/14/2011	11:22:57 AM	SiCl4 post valve closed
3/14/2011	11:22:57 AM	Bubbler valve closed
3/14/2011	11:22:57 AM	Main Vac valve opened
3/14/2011	11:22:57 AM	Bypass valve opened
3/14/2011	11:22:57 AM	Helium MFC set to  0.000000
3/14/2011	11:22:57 AM	H2 MFC set to  0.000000
3/14/2011	11:22:57 AM	BCl3 MFC set to  0.000000
3/14/2011	11:22:57 AM	PHl3 MFC set to  0.000000
3/14/2011	11:22:57 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:22:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:22:57 AM	Tube furnace set to 0
3/14/2011	11:23:57 AM	H2 valve closed
3/14/2011	11:23:57 AM	BCl3 valve closed
3/14/2011	11:23:57 AM	PH3 valve closed
3/14/2011	11:23:57 AM	SiCl4 pre valve closed
3/14/2011	11:23:57 AM	SiCl4 post valve closed
3/14/2011	11:23:57 AM	Bubbler valve closed
3/14/2011	11:23:57 AM	Helium valve opened
3/14/2011	11:23:57 AM	Main Vac valve opened
3/14/2011	11:23:57 AM	Bypass valve opened
3/14/2011	11:23:57 AM	Helium MFC set to  100.000000
3/14/2011	11:23:57 AM	H2 MFC set to  0.000000
3/14/2011	11:23:57 AM	BCl3 MFC set to  0.000000
3/14/2011	11:23:57 AM	PHl3 MFC set to  0.000000
3/14/2011	11:23:57 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:23:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:23:57 AM	Tube furnace set to 0
3/14/2011	11:24:57 AM	Helium valve closed
3/14/2011	11:24:57 AM	H2 valve closed
3/14/2011	11:24:57 AM	BCl3 valve closed
3/14/2011	11:24:57 AM	PH3 valve closed
3/14/2011	11:24:57 AM	SiCl4 pre valve closed
3/14/2011	11:24:57 AM	SiCl4 post valve closed
3/14/2011	11:24:57 AM	Bubbler valve closed
3/14/2011	11:24:57 AM	Main Vac valve opened
3/14/2011	11:24:57 AM	Bypass valve opened
3/14/2011	11:24:57 AM	Helium MFC set to  0.000000
3/14/2011	11:24:57 AM	H2 MFC set to  0.000000
3/14/2011	11:24:57 AM	BCl3 MFC set to  0.000000
3/14/2011	11:24:57 AM	PHl3 MFC set to  0.000000
3/14/2011	11:24:57 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:24:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:24:57 AM	Tube furnace set to 0
3/14/2011	11:25:57 AM	H2 valve closed
3/14/2011	11:25:57 AM	BCl3 valve closed
3/14/2011	11:25:57 AM	PH3 valve closed
3/14/2011	11:25:57 AM	SiCl4 pre valve closed
3/14/2011	11:25:57 AM	SiCl4 post valve closed
3/14/2011	11:25:57 AM	Bubbler valve closed
3/14/2011	11:25:57 AM	Helium valve opened
3/14/2011	11:25:57 AM	Main Vac valve opened
3/14/2011	11:25:57 AM	Bypass valve opened
3/14/2011	11:25:57 AM	Helium MFC set to  100.000000
3/14/2011	11:25:57 AM	H2 MFC set to  0.000000
3/14/2011	11:25:57 AM	BCl3 MFC set to  0.000000
3/14/2011	11:25:57 AM	PHl3 MFC set to  0.000000
3/14/2011	11:25:57 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:25:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:25:57 AM	Tube furnace set to 0
3/14/2011	11:26:57 AM	Helium valve closed
3/14/2011	11:26:57 AM	H2 valve closed
3/14/2011	11:26:57 AM	BCl3 valve closed
3/14/2011	11:26:57 AM	PH3 valve closed
3/14/2011	11:26:57 AM	SiCl4 pre valve closed
3/14/2011	11:26:57 AM	SiCl4 post valve closed
3/14/2011	11:26:57 AM	Bubbler valve closed
3/14/2011	11:26:57 AM	Main Vac valve opened
3/14/2011	11:26:57 AM	Bypass valve opened
3/14/2011	11:26:57 AM	Helium MFC set to  0.000000
3/14/2011	11:26:57 AM	H2 MFC set to  0.000000
3/14/2011	11:26:57 AM	BCl3 MFC set to  0.000000
3/14/2011	11:26:57 AM	PHl3 MFC set to  0.000000
3/14/2011	11:26:57 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:26:57 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:26:57 AM	Tube furnace set to 0
3/14/2011	11:27:58 AM	H2 valve closed
3/14/2011	11:27:58 AM	BCl3 valve closed
3/14/2011	11:27:58 AM	PH3 valve closed
3/14/2011	11:27:58 AM	SiCl4 pre valve closed
3/14/2011	11:27:58 AM	SiCl4 post valve closed
3/14/2011	11:27:58 AM	Bubbler valve closed
3/14/2011	11:27:58 AM	Helium valve opened
3/14/2011	11:27:58 AM	Main Vac valve opened
3/14/2011	11:27:58 AM	Bypass valve opened
3/14/2011	11:27:58 AM	Helium MFC set to  100.000000
3/14/2011	11:27:58 AM	H2 MFC set to  0.000000
3/14/2011	11:27:58 AM	BCl3 MFC set to  0.000000
3/14/2011	11:27:58 AM	PHl3 MFC set to  0.000000
3/14/2011	11:27:58 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:27:58 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:27:58 AM	Tube furnace set to 0
3/14/2011	11:28:58 AM	Helium valve closed
3/14/2011	11:28:58 AM	H2 valve closed
3/14/2011	11:28:58 AM	BCl3 valve closed
3/14/2011	11:28:58 AM	PH3 valve closed
3/14/2011	11:28:58 AM	SiCl4 pre valve closed
3/14/2011	11:28:58 AM	SiCl4 post valve closed
3/14/2011	11:28:58 AM	Bubbler valve closed
3/14/2011	11:28:58 AM	Main Vac valve opened
3/14/2011	11:28:58 AM	Bypass valve opened
3/14/2011	11:28:58 AM	Helium MFC set to  0.000000
3/14/2011	11:28:58 AM	H2 MFC set to  0.000000
3/14/2011	11:28:58 AM	BCl3 MFC set to  0.000000
3/14/2011	11:28:58 AM	PHl3 MFC set to  0.000000
3/14/2011	11:28:58 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:28:58 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:28:58 AM	Tube furnace set to 0
3/14/2011	11:29:58 AM	H2 valve closed
3/14/2011	11:29:58 AM	BCl3 valve closed
3/14/2011	11:29:58 AM	PH3 valve closed
3/14/2011	11:29:58 AM	SiCl4 pre valve closed
3/14/2011	11:29:58 AM	SiCl4 post valve closed
3/14/2011	11:29:58 AM	Bubbler valve closed
3/14/2011	11:29:58 AM	Helium valve opened
3/14/2011	11:29:58 AM	Main Vac valve opened
3/14/2011	11:29:58 AM	Bypass valve opened
3/14/2011	11:29:58 AM	Helium MFC set to  100.000000
3/14/2011	11:29:58 AM	H2 MFC set to  0.000000
3/14/2011	11:29:58 AM	BCl3 MFC set to  0.000000
3/14/2011	11:29:58 AM	PHl3 MFC set to  0.000000
3/14/2011	11:29:58 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:29:58 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:29:58 AM	Tube furnace set to 0
3/14/2011	11:30:58 AM	Helium valve closed
3/14/2011	11:30:58 AM	H2 valve closed
3/14/2011	11:30:58 AM	BCl3 valve closed
3/14/2011	11:30:58 AM	PH3 valve closed
3/14/2011	11:30:58 AM	SiCl4 pre valve closed
3/14/2011	11:30:58 AM	SiCl4 post valve closed
3/14/2011	11:30:58 AM	Bubbler valve closed
3/14/2011	11:30:58 AM	Main Vac valve opened
3/14/2011	11:30:58 AM	Bypass valve opened
3/14/2011	11:30:58 AM	Helium MFC set to  0.000000
3/14/2011	11:30:58 AM	H2 MFC set to  0.000000
3/14/2011	11:30:58 AM	BCl3 MFC set to  0.000000
3/14/2011	11:30:58 AM	PHl3 MFC set to  0.000000
3/14/2011	11:30:58 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:30:58 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:30:58 AM	Tube furnace set to 0
3/14/2011	11:31:58 AM	H2 valve closed
3/14/2011	11:31:58 AM	BCl3 valve closed
3/14/2011	11:31:58 AM	PH3 valve closed
3/14/2011	11:31:58 AM	SiCl4 pre valve closed
3/14/2011	11:31:58 AM	SiCl4 post valve closed
3/14/2011	11:31:58 AM	Bubbler valve closed
3/14/2011	11:31:58 AM	Helium valve opened
3/14/2011	11:31:58 AM	Main Vac valve opened
3/14/2011	11:31:58 AM	Bypass valve opened
3/14/2011	11:31:58 AM	Helium MFC set to  100.000000
3/14/2011	11:31:58 AM	H2 MFC set to  0.000000
3/14/2011	11:31:58 AM	BCl3 MFC set to  0.000000
3/14/2011	11:31:58 AM	PHl3 MFC set to  0.000000
3/14/2011	11:31:58 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:31:58 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:31:58 AM	Tube furnace set to 0
3/14/2011	11:32:52 AM	Helium valve closed
3/14/2011	11:32:52 AM	H2 valve closed
3/14/2011	11:32:52 AM	BCl3 valve closed
3/14/2011	11:32:52 AM	PH3 valve closed
3/14/2011	11:32:52 AM	SiCl4 pre valve closed
3/14/2011	11:32:52 AM	SiCl4 post valve closed
3/14/2011	11:32:52 AM	Bubbler valve closed
3/14/2011	11:32:52 AM	Main Vac valve opened
3/14/2011	11:32:52 AM	Bypass valve opened
3/14/2011	11:32:52 AM	Helium MFC set to  0.000000
3/14/2011	11:32:52 AM	H2 MFC set to  0.000000
3/14/2011	11:32:52 AM	BCl3 MFC set to  0.000000
3/14/2011	11:32:52 AM	PHl3 MFC set to  0.000000
3/14/2011	11:32:52 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:32:52 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:32:52 AM	Tube furnace set to 0
3/14/2011	11:33:52 AM	H2 valve closed
3/14/2011	11:33:52 AM	BCl3 valve closed
3/14/2011	11:33:52 AM	PH3 valve closed
3/14/2011	11:33:52 AM	SiCl4 pre valve closed
3/14/2011	11:33:52 AM	SiCl4 post valve closed
3/14/2011	11:33:52 AM	Bubbler valve closed
3/14/2011	11:33:52 AM	Helium valve opened
3/14/2011	11:33:52 AM	Main Vac valve opened
3/14/2011	11:33:52 AM	Bypass valve opened
3/14/2011	11:33:52 AM	Helium MFC set to  100.000000
3/14/2011	11:33:52 AM	H2 MFC set to  0.000000
3/14/2011	11:33:52 AM	BCl3 MFC set to  0.000000
3/14/2011	11:33:52 AM	PHl3 MFC set to  0.000000
3/14/2011	11:33:52 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:33:52 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:33:52 AM	Tube furnace set to 0
3/14/2011	11:34:52 AM	Helium valve closed
3/14/2011	11:34:52 AM	H2 valve closed
3/14/2011	11:34:52 AM	BCl3 valve closed
3/14/2011	11:34:52 AM	PH3 valve closed
3/14/2011	11:34:52 AM	SiCl4 pre valve closed
3/14/2011	11:34:52 AM	SiCl4 post valve closed
3/14/2011	11:34:52 AM	Bubbler valve closed
3/14/2011	11:34:52 AM	Main Vac valve opened
3/14/2011	11:34:52 AM	Bypass valve opened
3/14/2011	11:34:52 AM	Helium MFC set to  0.000000
3/14/2011	11:34:52 AM	H2 MFC set to  0.000000
3/14/2011	11:34:52 AM	BCl3 MFC set to  0.000000
3/14/2011	11:34:52 AM	PHl3 MFC set to  0.000000
3/14/2011	11:34:52 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:34:52 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:34:53 AM	Tube furnace set to 0
3/14/2011	11:35:53 AM	H2 valve closed
3/14/2011	11:35:53 AM	BCl3 valve closed
3/14/2011	11:35:53 AM	PH3 valve closed
3/14/2011	11:35:53 AM	SiCl4 pre valve closed
3/14/2011	11:35:53 AM	SiCl4 post valve closed
3/14/2011	11:35:53 AM	Bubbler valve closed
3/14/2011	11:35:53 AM	Helium valve opened
3/14/2011	11:35:53 AM	Main Vac valve opened
3/14/2011	11:35:53 AM	Bypass valve opened
3/14/2011	11:35:53 AM	Helium MFC set to  100.000000
3/14/2011	11:35:53 AM	H2 MFC set to  0.000000
3/14/2011	11:35:53 AM	BCl3 MFC set to  0.000000
3/14/2011	11:35:53 AM	PHl3 MFC set to  0.000000
3/14/2011	11:35:53 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:35:53 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:35:53 AM	Tube furnace set to 0
3/14/2011	11:36:53 AM	Helium valve closed
3/14/2011	11:36:53 AM	H2 valve closed
3/14/2011	11:36:53 AM	BCl3 valve closed
3/14/2011	11:36:53 AM	PH3 valve closed
3/14/2011	11:36:53 AM	SiCl4 pre valve closed
3/14/2011	11:36:53 AM	SiCl4 post valve closed
3/14/2011	11:36:53 AM	Bubbler valve closed
3/14/2011	11:36:53 AM	Main Vac valve opened
3/14/2011	11:36:53 AM	Bypass valve opened
3/14/2011	11:36:53 AM	Helium MFC set to  0.000000
3/14/2011	11:36:53 AM	H2 MFC set to  0.000000
3/14/2011	11:36:53 AM	BCl3 MFC set to  0.000000
3/14/2011	11:36:53 AM	PHl3 MFC set to  0.000000
3/14/2011	11:36:53 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:36:53 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:36:53 AM	Tube furnace set to 0
3/14/2011	11:37:53 AM	H2 valve closed
3/14/2011	11:37:53 AM	BCl3 valve closed
3/14/2011	11:37:53 AM	PH3 valve closed
3/14/2011	11:37:53 AM	SiCl4 pre valve closed
3/14/2011	11:37:53 AM	SiCl4 post valve closed
3/14/2011	11:37:53 AM	Bubbler valve closed
3/14/2011	11:37:53 AM	Helium valve opened
3/14/2011	11:37:53 AM	Main Vac valve opened
3/14/2011	11:37:53 AM	Bypass valve opened
3/14/2011	11:37:53 AM	Helium MFC set to  100.000000
3/14/2011	11:37:53 AM	H2 MFC set to  0.000000
3/14/2011	11:37:53 AM	BCl3 MFC set to  0.000000
3/14/2011	11:37:53 AM	PHl3 MFC set to  0.000000
3/14/2011	11:37:53 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:37:53 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:37:53 AM	Tube furnace set to 0
3/14/2011	11:38:53 AM	Helium valve closed
3/14/2011	11:38:53 AM	H2 valve closed
3/14/2011	11:38:53 AM	BCl3 valve closed
3/14/2011	11:38:53 AM	PH3 valve closed
3/14/2011	11:38:53 AM	SiCl4 pre valve closed
3/14/2011	11:38:53 AM	SiCl4 post valve closed
3/14/2011	11:38:53 AM	Bubbler valve closed
3/14/2011	11:38:53 AM	Main Vac valve opened
3/14/2011	11:38:53 AM	Bypass valve opened
3/14/2011	11:38:53 AM	Helium MFC set to  0.000000
3/14/2011	11:38:53 AM	H2 MFC set to  0.000000
3/14/2011	11:38:53 AM	BCl3 MFC set to  0.000000
3/14/2011	11:38:53 AM	PHl3 MFC set to  0.000000
3/14/2011	11:38:53 AM	SiCl4 MFC set to  0.000000
3/14/2011	11:38:53 AM	Bypass solenoid MFC set to  0.000000
3/14/2011	11:38:53 AM	Tube furnace set to 0
3/14/2011	11:38:54 AM	Run finished at 11:38 AM
3/14/2011	11:38:54 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
3/14/2011	11:43:38 AM	Bypass valve closed
3/14/2011	11:43:50 AM	Helium MFC set to  50.000000
3/14/2011	11:43:54 AM	Helium valve opened
3/14/2011	11:45:07 AM	Helium valve closed
3/14/2011	11:50:14 AM	Helium valve opened
3/14/2011	11:53:12 AM	Helium valve closed
3/14/2011	11:53:13 AM	Bypass valve opened
3/14/2011	12:03:23 PM	Helium valve opened
3/14/2011	12:04:02 PM	Helium valve closed
3/14/2011	12:04:04 PM	Helium MFC set to  0.000000
3/14/2011	12:05:20 PM	Recipe started at 12:05 PM
3/14/2011	12:05:20 PM	Helium valve closed
3/14/2011	12:05:20 PM	BCl3 valve closed
3/14/2011	12:05:20 PM	PH3 valve closed
3/14/2011	12:05:20 PM	SiCl4 pre valve closed
3/14/2011	12:05:20 PM	SiCl4 post valve closed
3/14/2011	12:05:20 PM	Main Vac valve closed
3/14/2011	12:05:20 PM	Bypass valve closed
3/14/2011	12:05:20 PM	Bubbler valve closed
3/14/2011	12:05:20 PM	H2 valve opened
3/14/2011	12:05:20 PM	Helium MFC set to  0.000000
3/14/2011	12:05:20 PM	H2 MFC set to  500.000000
3/14/2011	12:05:20 PM	BCl3 MFC set to  0.000000
3/14/2011	12:05:20 PM	PHl3 MFC set to  0.000000
3/14/2011	12:05:20 PM	SiCl4 MFC set to  0.000000
3/14/2011	12:05:20 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:05:20 PM	Tube furnace set to 200
3/14/2011	12:06:39 PM	Helium valve closed
3/14/2011	12:06:39 PM	BCl3 valve closed
3/14/2011	12:06:39 PM	PH3 valve closed
3/14/2011	12:06:39 PM	SiCl4 pre valve closed
3/14/2011	12:06:39 PM	SiCl4 post valve closed
3/14/2011	12:06:39 PM	Main Vac valve closed
3/14/2011	12:06:39 PM	Bypass valve closed
3/14/2011	12:06:39 PM	H2 valve opened
3/14/2011	12:06:39 PM	Bubbler valve opened
3/14/2011	12:06:39 PM	Helium MFC set to  0.000000
3/14/2011	12:06:39 PM	H2 MFC set to  400.000000
3/14/2011	12:06:39 PM	BCl3 MFC set to  0.000000
3/14/2011	12:06:39 PM	PHl3 MFC set to  0.000000
3/14/2011	12:06:39 PM	SiCl4 MFC set to  0.000000
3/14/2011	12:06:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:06:39 PM	Tube furnace set to 1001
3/14/2011	12:24:39 PM	Helium valve closed
3/14/2011	12:24:39 PM	BCl3 valve closed
3/14/2011	12:24:39 PM	PH3 valve closed
3/14/2011	12:24:39 PM	SiCl4 pre valve closed
3/14/2011	12:24:39 PM	SiCl4 post valve closed
3/14/2011	12:24:39 PM	Main Vac valve closed
3/14/2011	12:24:39 PM	Bypass valve closed
3/14/2011	12:24:39 PM	H2 valve opened
3/14/2011	12:24:39 PM	Bubbler valve opened
3/14/2011	12:24:39 PM	Helium MFC set to  0.000000
3/14/2011	12:24:39 PM	H2 MFC set to  400.000000
3/14/2011	12:24:39 PM	BCl3 MFC set to  0.000000
3/14/2011	12:24:39 PM	PHl3 MFC set to  0.000000
3/14/2011	12:24:39 PM	SiCl4 MFC set to  0.000000
3/14/2011	12:24:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:24:39 PM	Tube furnace set to 1000
3/14/2011	12:26:39 PM	Helium valve closed
3/14/2011	12:26:39 PM	PH3 valve closed
3/14/2011	12:26:39 PM	Main Vac valve closed
3/14/2011	12:26:39 PM	Bypass valve closed
3/14/2011	12:26:39 PM	H2 valve opened
3/14/2011	12:26:39 PM	BCl3 valve opened
3/14/2011	12:26:39 PM	SiCl4 pre valve opened
3/14/2011	12:26:39 PM	SiCl4 post valve opened
3/14/2011	12:26:39 PM	Bubbler valve opened
3/14/2011	12:26:39 PM	Helium MFC set to  0.000000
3/14/2011	12:26:39 PM	H2 MFC set to  500.000000
3/14/2011	12:26:39 PM	BCl3 MFC set to  3.500000
3/14/2011	12:26:39 PM	PHl3 MFC set to  0.000000
3/14/2011	12:26:39 PM	SiCl4 MFC set to  51.000000
3/14/2011	12:26:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:26:39 PM	Tube furnace set to 1000
3/14/2011	12:43:39 PM	Helium valve closed
3/14/2011	12:43:39 PM	BCl3 valve closed
3/14/2011	12:43:39 PM	PH3 valve closed
3/14/2011	12:43:39 PM	SiCl4 pre valve closed
3/14/2011	12:43:39 PM	SiCl4 post valve closed
3/14/2011	12:43:39 PM	Main Vac valve closed
3/14/2011	12:43:39 PM	Bypass valve closed
3/14/2011	12:43:39 PM	H2 valve opened
3/14/2011	12:43:39 PM	Bubbler valve opened
3/14/2011	12:43:39 PM	Helium MFC set to  0.000000
3/14/2011	12:43:39 PM	H2 MFC set to  500.000000
3/14/2011	12:43:39 PM	BCl3 MFC set to  0.000000
3/14/2011	12:43:39 PM	PHl3 MFC set to  0.000000
3/14/2011	12:43:39 PM	SiCl4 MFC set to  0.000000
3/14/2011	12:43:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:43:39 PM	Tube furnace set to 0
3/14/2011	12:46:31 PM	H2 valve closed
3/14/2011	12:46:31 PM	BCl3 valve closed
3/14/2011	12:46:31 PM	PH3 valve closed
3/14/2011	12:46:31 PM	SiCl4 pre valve closed
3/14/2011	12:46:31 PM	SiCl4 post valve closed
3/14/2011	12:46:31 PM	Main Vac valve closed
3/14/2011	12:46:31 PM	Bypass valve closed
3/14/2011	12:46:31 PM	Helium valve opened
3/14/2011	12:46:31 PM	Bubbler valve opened
3/14/2011	12:46:31 PM	Helium MFC set to  400.000000
3/14/2011	12:46:31 PM	H2 MFC set to  0.000000
3/14/2011	12:46:31 PM	BCl3 MFC set to  0.000000
3/14/2011	12:46:31 PM	PHl3 MFC set to  0.000000
3/14/2011	12:46:31 PM	SiCl4 MFC set to  0.000000
3/14/2011	12:46:31 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	12:46:31 PM	Tube furnace set to 0
3/14/2011	1:06:31 PM	Helium valve closed
3/14/2011	1:06:31 PM	H2 valve closed
3/14/2011	1:06:31 PM	BCl3 valve closed
3/14/2011	1:06:31 PM	PH3 valve closed
3/14/2011	1:06:31 PM	SiCl4 pre valve closed
3/14/2011	1:06:31 PM	SiCl4 post valve closed
3/14/2011	1:06:31 PM	Main Vac valve closed
3/14/2011	1:06:31 PM	Bypass valve closed
3/14/2011	1:06:31 PM	Bubbler valve closed
3/14/2011	1:06:31 PM	Helium MFC set to  0.000000
3/14/2011	1:06:31 PM	H2 MFC set to  0.000000
3/14/2011	1:06:31 PM	BCl3 MFC set to  0.000000
3/14/2011	1:06:31 PM	PHl3 MFC set to  0.000000
3/14/2011	1:06:31 PM	SiCl4 MFC set to  0.000000
3/14/2011	1:06:31 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	1:06:31 PM	Tube furnace set to 0
3/14/2011	1:06:32 PM	Run finished at 1:06 PM
3/14/2011	1:27:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	1:27:28 PM	Recipe started at 1:27 PM
3/14/2011	1:27:28 PM	Helium valve closed
3/14/2011	1:27:28 PM	H2 valve closed
3/14/2011	1:27:28 PM	BCl3 valve closed
3/14/2011	1:27:28 PM	PH3 valve closed
3/14/2011	1:27:28 PM	SiCl4 pre valve closed
3/14/2011	1:27:28 PM	SiCl4 post valve closed
3/14/2011	1:27:28 PM	Main Vac valve closed
3/14/2011	1:27:28 PM	Bubbler valve closed
3/14/2011	1:27:28 PM	Bypass valve opened
3/14/2011	1:27:28 PM	Helium MFC set to  0.000000
3/14/2011	1:27:28 PM	H2 MFC set to  0.000000
3/14/2011	1:27:28 PM	BCl3 MFC set to  0.000000
3/14/2011	1:27:28 PM	PHl3 MFC set to  0.000000
3/14/2011	1:27:28 PM	SiCl4 MFC set to  0.000000
3/14/2011	1:27:28 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	1:27:28 PM	Tube furnace set to 0
3/14/2011	1:28:01 PM	Helium valve closed
3/14/2011	1:28:01 PM	H2 valve closed
3/14/2011	1:28:01 PM	BCl3 valve closed
3/14/2011	1:28:01 PM	PH3 valve closed
3/14/2011	1:28:01 PM	SiCl4 pre valve closed
3/14/2011	1:28:01 PM	SiCl4 post valve closed
3/14/2011	1:28:01 PM	Bubbler valve closed
3/14/2011	1:28:01 PM	Main Vac valve opened
3/14/2011	1:28:01 PM	Bypass valve opened
3/14/2011	1:28:01 PM	Helium MFC set to  0.000000
3/14/2011	1:28:01 PM	H2 MFC set to  0.000000
3/14/2011	1:28:01 PM	BCl3 MFC set to  0.000000
3/14/2011	1:28:01 PM	PHl3 MFC set to  0.000000
3/14/2011	1:28:01 PM	SiCl4 MFC set to  0.000000
3/14/2011	1:28:01 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	1:28:01 PM	Tube furnace set to 0
3/14/2011	1:28:01 PM	Run finished at 1:28 PM
3/14/2011	1:28:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	1:29:33 PM	Helium MFC set to  50.000000
3/14/2011	1:29:34 PM	Helium valve opened
3/14/2011	1:29:35 PM	Bypass valve closed
3/14/2011	1:30:29 PM	Helium valve closed
3/14/2011	1:30:31 PM	Bypass valve opened
3/14/2011	1:32:32 PM	Helium valve opened
3/14/2011	1:36:14 PM	Helium valve closed
3/14/2011	1:42:32 PM	Helium valve opened
3/14/2011	1:46:27 PM	Helium valve closed
3/14/2011	1:47:20 PM	Helium valve opened
3/14/2011	1:47:25 PM	Bypass valve closed
3/14/2011	1:52:22 PM	Helium valve closed
3/14/2011	1:52:31 PM	Bypass valve opened
3/14/2011	1:53:15 PM	Helium valve opened
3/14/2011	2:06:14 PM	Helium valve closed
3/14/2011	2:15:04 PM	Helium valve opened
3/14/2011	2:15:05 PM	Bypass valve closed
3/14/2011	2:16:28 PM	Helium valve closed
3/14/2011	2:16:31 PM	Helium MFC set to  0.000000
3/14/2011	2:17:27 PM	Recipe started at 2:17 PM
3/14/2011	2:17:27 PM	Helium valve closed
3/14/2011	2:17:27 PM	BCl3 valve closed
3/14/2011	2:17:27 PM	PH3 valve closed
3/14/2011	2:17:27 PM	SiCl4 pre valve closed
3/14/2011	2:17:27 PM	SiCl4 post valve closed
3/14/2011	2:17:27 PM	Main Vac valve closed
3/14/2011	2:17:27 PM	Bypass valve closed
3/14/2011	2:17:27 PM	Bubbler valve closed
3/14/2011	2:17:27 PM	H2 valve opened
3/14/2011	2:17:27 PM	Helium MFC set to  0.000000
3/14/2011	2:17:27 PM	H2 MFC set to  500.000000
3/14/2011	2:17:27 PM	BCl3 MFC set to  0.000000
3/14/2011	2:17:27 PM	PHl3 MFC set to  0.000000
3/14/2011	2:17:27 PM	SiCl4 MFC set to  0.000000
3/14/2011	2:17:27 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	2:17:27 PM	Tube furnace set to 200
3/14/2011	2:18:46 PM	Helium valve closed
3/14/2011	2:18:46 PM	BCl3 valve closed
3/14/2011	2:18:46 PM	PH3 valve closed
3/14/2011	2:18:46 PM	SiCl4 pre valve closed
3/14/2011	2:18:46 PM	SiCl4 post valve closed
3/14/2011	2:18:46 PM	Main Vac valve closed
3/14/2011	2:18:46 PM	Bypass valve closed
3/14/2011	2:18:46 PM	H2 valve opened
3/14/2011	2:18:46 PM	Bubbler valve opened
3/14/2011	2:18:46 PM	Helium MFC set to  0.000000
3/14/2011	2:18:46 PM	H2 MFC set to  400.000000
3/14/2011	2:18:46 PM	BCl3 MFC set to  0.000000
3/14/2011	2:18:46 PM	PHl3 MFC set to  0.000000
3/14/2011	2:18:46 PM	SiCl4 MFC set to  0.000000
3/14/2011	2:18:46 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	2:18:47 PM	Tube furnace set to 1001
3/14/2011	2:39:47 PM	Helium valve closed
3/14/2011	2:39:47 PM	PH3 valve closed
3/14/2011	2:39:47 PM	Main Vac valve closed
3/14/2011	2:39:47 PM	Bypass valve closed
3/14/2011	2:39:47 PM	H2 valve opened
3/14/2011	2:39:47 PM	BCl3 valve opened
3/14/2011	2:39:47 PM	SiCl4 pre valve opened
3/14/2011	2:39:47 PM	SiCl4 post valve opened
3/14/2011	2:39:47 PM	Bubbler valve opened
3/14/2011	2:39:47 PM	Helium MFC set to  0.000000
3/14/2011	2:39:47 PM	H2 MFC set to  500.000000
3/14/2011	2:39:47 PM	BCl3 MFC set to  3.500000
3/14/2011	2:39:47 PM	PHl3 MFC set to  0.000000
3/14/2011	2:39:47 PM	SiCl4 MFC set to  55.000000
3/14/2011	2:39:47 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	2:39:47 PM	Tube furnace set to 1000
3/14/2011	2:56:47 PM	Helium valve closed
3/14/2011	2:56:47 PM	BCl3 valve closed
3/14/2011	2:56:47 PM	PH3 valve closed
3/14/2011	2:56:47 PM	SiCl4 pre valve closed
3/14/2011	2:56:47 PM	SiCl4 post valve closed
3/14/2011	2:56:47 PM	Main Vac valve closed
3/14/2011	2:56:47 PM	Bypass valve closed
3/14/2011	2:56:47 PM	H2 valve opened
3/14/2011	2:56:47 PM	Bubbler valve opened
3/14/2011	2:56:47 PM	Helium MFC set to  0.000000
3/14/2011	2:56:47 PM	H2 MFC set to  500.000000
3/14/2011	2:56:47 PM	BCl3 MFC set to  0.000000
3/14/2011	2:56:47 PM	PHl3 MFC set to  0.000000
3/14/2011	2:56:47 PM	SiCl4 MFC set to  0.000000
3/14/2011	2:56:47 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	2:56:47 PM	Tube furnace set to 0
3/14/2011	2:59:39 PM	H2 valve closed
3/14/2011	2:59:39 PM	BCl3 valve closed
3/14/2011	2:59:39 PM	PH3 valve closed
3/14/2011	2:59:39 PM	SiCl4 pre valve closed
3/14/2011	2:59:39 PM	SiCl4 post valve closed
3/14/2011	2:59:39 PM	Main Vac valve closed
3/14/2011	2:59:39 PM	Bypass valve closed
3/14/2011	2:59:39 PM	Helium valve opened
3/14/2011	2:59:40 PM	Bubbler valve opened
3/14/2011	2:59:40 PM	Helium MFC set to  400.000000
3/14/2011	2:59:40 PM	H2 MFC set to  0.000000
3/14/2011	2:59:40 PM	BCl3 MFC set to  0.000000
3/14/2011	2:59:40 PM	PHl3 MFC set to  0.000000
3/14/2011	2:59:40 PM	SiCl4 MFC set to  0.000000
3/14/2011	2:59:40 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	2:59:40 PM	Tube furnace set to 0
3/14/2011	3:19:40 PM	Helium valve closed
3/14/2011	3:19:40 PM	H2 valve closed
3/14/2011	3:19:40 PM	BCl3 valve closed
3/14/2011	3:19:40 PM	PH3 valve closed
3/14/2011	3:19:40 PM	SiCl4 pre valve closed
3/14/2011	3:19:40 PM	SiCl4 post valve closed
3/14/2011	3:19:40 PM	Main Vac valve closed
3/14/2011	3:19:40 PM	Bypass valve closed
3/14/2011	3:19:40 PM	Bubbler valve closed
3/14/2011	3:19:40 PM	Helium MFC set to  0.000000
3/14/2011	3:19:40 PM	H2 MFC set to  0.000000
3/14/2011	3:19:40 PM	BCl3 MFC set to  0.000000
3/14/2011	3:19:40 PM	PHl3 MFC set to  0.000000
3/14/2011	3:19:40 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:19:40 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:19:40 PM	Tube furnace set to 0
3/14/2011	3:19:40 PM	Run finished at 3:19 PM
3/14/2011	3:28:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	3:28:15 PM	Recipe started at 3:28 PM
3/14/2011	3:28:15 PM	Helium valve closed
3/14/2011	3:28:15 PM	H2 valve closed
3/14/2011	3:28:15 PM	BCl3 valve closed
3/14/2011	3:28:15 PM	PH3 valve closed
3/14/2011	3:28:15 PM	SiCl4 pre valve closed
3/14/2011	3:28:15 PM	SiCl4 post valve closed
3/14/2011	3:28:15 PM	Main Vac valve closed
3/14/2011	3:28:15 PM	Bubbler valve closed
3/14/2011	3:28:15 PM	Bypass valve opened
3/14/2011	3:28:15 PM	Helium MFC set to  0.000000
3/14/2011	3:28:15 PM	H2 MFC set to  0.000000
3/14/2011	3:28:15 PM	BCl3 MFC set to  0.000000
3/14/2011	3:28:15 PM	PHl3 MFC set to  0.000000
3/14/2011	3:28:15 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:28:15 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:28:16 PM	Tube furnace set to 0
3/14/2011	3:28:38 PM	Helium valve closed
3/14/2011	3:28:38 PM	H2 valve closed
3/14/2011	3:28:38 PM	BCl3 valve closed
3/14/2011	3:28:38 PM	PH3 valve closed
3/14/2011	3:28:38 PM	SiCl4 pre valve closed
3/14/2011	3:28:38 PM	SiCl4 post valve closed
3/14/2011	3:28:38 PM	Bubbler valve closed
3/14/2011	3:28:38 PM	Main Vac valve opened
3/14/2011	3:28:38 PM	Bypass valve opened
3/14/2011	3:28:38 PM	Helium MFC set to  0.000000
3/14/2011	3:28:38 PM	H2 MFC set to  0.000000
3/14/2011	3:28:38 PM	BCl3 MFC set to  0.000000
3/14/2011	3:28:38 PM	PHl3 MFC set to  0.000000
3/14/2011	3:28:38 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:28:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:28:38 PM	Tube furnace set to 0
3/14/2011	3:28:38 PM	Run finished at 3:28 PM
3/14/2011	3:28:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	3:28:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	3:28:45 PM	Recipe started at 3:28 PM
3/14/2011	3:28:45 PM	H2 valve closed
3/14/2011	3:28:45 PM	BCl3 valve closed
3/14/2011	3:28:45 PM	PH3 valve closed
3/14/2011	3:28:45 PM	SiCl4 pre valve closed
3/14/2011	3:28:45 PM	SiCl4 post valve closed
3/14/2011	3:28:45 PM	Main Vac valve closed
3/14/2011	3:28:45 PM	Bypass valve closed
3/14/2011	3:28:45 PM	Bubbler valve closed
3/14/2011	3:28:45 PM	Helium valve opened
3/14/2011	3:28:45 PM	Helium MFC set to  500.000000
3/14/2011	3:28:45 PM	H2 MFC set to  0.000000
3/14/2011	3:28:45 PM	BCl3 MFC set to  0.000000
3/14/2011	3:28:45 PM	PHl3 MFC set to  0.000000
3/14/2011	3:28:45 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:28:45 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:28:45 PM	Tube furnace set to 0
3/14/2011	3:29:57 PM	Helium valve closed
3/14/2011	3:29:57 PM	H2 valve closed
3/14/2011	3:29:57 PM	BCl3 valve closed
3/14/2011	3:29:57 PM	PH3 valve closed
3/14/2011	3:29:57 PM	SiCl4 pre valve closed
3/14/2011	3:29:57 PM	SiCl4 post valve closed
3/14/2011	3:29:57 PM	Main Vac valve closed
3/14/2011	3:29:57 PM	Bypass valve closed
3/14/2011	3:29:57 PM	Bubbler valve closed
3/14/2011	3:29:57 PM	Helium MFC set to  0.000000
3/14/2011	3:29:57 PM	H2 MFC set to  0.000000
3/14/2011	3:29:57 PM	BCl3 MFC set to  0.000000
3/14/2011	3:29:57 PM	PHl3 MFC set to  0.000000
3/14/2011	3:29:57 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:29:57 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:29:57 PM	Tube furnace set to 0
3/14/2011	3:29:58 PM	Run finished at 3:29 PM
3/14/2011	3:29:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	3:33:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	3:33:30 PM	Recipe started at 3:33 PM
3/14/2011	3:33:30 PM	H2 valve closed
3/14/2011	3:33:30 PM	BCl3 valve closed
3/14/2011	3:33:30 PM	PH3 valve closed
3/14/2011	3:33:30 PM	SiCl4 pre valve closed
3/14/2011	3:33:30 PM	SiCl4 post valve closed
3/14/2011	3:33:30 PM	Main Vac valve closed
3/14/2011	3:33:30 PM	Bypass valve closed
3/14/2011	3:33:30 PM	Bubbler valve closed
3/14/2011	3:33:30 PM	Helium valve opened
3/14/2011	3:33:30 PM	Helium MFC set to  500.000000
3/14/2011	3:33:30 PM	H2 MFC set to  0.000000
3/14/2011	3:33:30 PM	BCl3 MFC set to  0.000000
3/14/2011	3:33:30 PM	PHl3 MFC set to  0.000000
3/14/2011	3:33:30 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:33:30 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:33:30 PM	Tube furnace set to 0
3/14/2011	3:33:32 PM	Helium valve closed
3/14/2011	3:33:32 PM	H2 valve closed
3/14/2011	3:33:32 PM	BCl3 valve closed
3/14/2011	3:33:32 PM	PH3 valve closed
3/14/2011	3:33:32 PM	SiCl4 pre valve closed
3/14/2011	3:33:32 PM	SiCl4 post valve closed
3/14/2011	3:33:32 PM	Main Vac valve closed
3/14/2011	3:33:32 PM	Bypass valve closed
3/14/2011	3:33:32 PM	Bubbler valve closed
3/14/2011	3:33:32 PM	Helium MFC set to  0.000000
3/14/2011	3:33:32 PM	H2 MFC set to  0.000000
3/14/2011	3:33:32 PM	BCl3 MFC set to  0.000000
3/14/2011	3:33:32 PM	PHl3 MFC set to  0.000000
3/14/2011	3:33:32 PM	SiCl4 MFC set to  0.000000
3/14/2011	3:33:32 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	3:33:33 PM	Tube furnace set to 0
3/14/2011	3:33:33 PM	Run finished at 3:33 PM
3/14/2011	3:33:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	5:16:37 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	5:16:38 PM	Recipe started at 5:16 PM
3/14/2011	5:16:38 PM	Helium valve closed
3/14/2011	5:16:38 PM	H2 valve closed
3/14/2011	5:16:38 PM	BCl3 valve closed
3/14/2011	5:16:38 PM	PH3 valve closed
3/14/2011	5:16:38 PM	SiCl4 pre valve closed
3/14/2011	5:16:38 PM	SiCl4 post valve closed
3/14/2011	5:16:38 PM	Main Vac valve closed
3/14/2011	5:16:38 PM	Bubbler valve closed
3/14/2011	5:16:38 PM	Bypass valve opened
3/14/2011	5:16:38 PM	Helium MFC set to  0.000000
3/14/2011	5:16:38 PM	H2 MFC set to  0.000000
3/14/2011	5:16:38 PM	BCl3 MFC set to  0.000000
3/14/2011	5:16:38 PM	PHl3 MFC set to  0.000000
3/14/2011	5:16:38 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:16:38 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:16:38 PM	Tube furnace set to 0
3/14/2011	5:17:01 PM	Helium valve closed
3/14/2011	5:17:01 PM	H2 valve closed
3/14/2011	5:17:01 PM	BCl3 valve closed
3/14/2011	5:17:01 PM	PH3 valve closed
3/14/2011	5:17:01 PM	SiCl4 pre valve closed
3/14/2011	5:17:01 PM	SiCl4 post valve closed
3/14/2011	5:17:01 PM	Bubbler valve closed
3/14/2011	5:17:01 PM	Main Vac valve opened
3/14/2011	5:17:01 PM	Bypass valve opened
3/14/2011	5:17:01 PM	Helium MFC set to  0.000000
3/14/2011	5:17:01 PM	H2 MFC set to  0.000000
3/14/2011	5:17:01 PM	BCl3 MFC set to  0.000000
3/14/2011	5:17:01 PM	PHl3 MFC set to  0.000000
3/14/2011	5:17:01 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:17:01 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:17:01 PM	Tube furnace set to 0
3/14/2011	5:17:01 PM	Run finished at 5:17 PM
3/14/2011	5:17:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	5:17:06 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	5:17:06 PM	Recipe started at 5:17 PM
3/14/2011	5:17:06 PM	H2 valve closed
3/14/2011	5:17:06 PM	BCl3 valve closed
3/14/2011	5:17:06 PM	PH3 valve closed
3/14/2011	5:17:06 PM	SiCl4 pre valve closed
3/14/2011	5:17:06 PM	SiCl4 post valve closed
3/14/2011	5:17:06 PM	Main Vac valve closed
3/14/2011	5:17:06 PM	Bypass valve closed
3/14/2011	5:17:06 PM	Bubbler valve closed
3/14/2011	5:17:06 PM	Helium valve opened
3/14/2011	5:17:06 PM	Helium MFC set to  500.000000
3/14/2011	5:17:06 PM	H2 MFC set to  0.000000
3/14/2011	5:17:06 PM	BCl3 MFC set to  0.000000
3/14/2011	5:17:06 PM	PHl3 MFC set to  0.000000
3/14/2011	5:17:06 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:17:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:17:07 PM	Tube furnace set to 0
3/14/2011	5:18:26 PM	Helium valve closed
3/14/2011	5:18:26 PM	H2 valve closed
3/14/2011	5:18:26 PM	BCl3 valve closed
3/14/2011	5:18:26 PM	PH3 valve closed
3/14/2011	5:18:26 PM	SiCl4 pre valve closed
3/14/2011	5:18:26 PM	SiCl4 post valve closed
3/14/2011	5:18:26 PM	Main Vac valve closed
3/14/2011	5:18:26 PM	Bypass valve closed
3/14/2011	5:18:26 PM	Bubbler valve closed
3/14/2011	5:18:26 PM	Helium MFC set to  0.000000
3/14/2011	5:18:26 PM	H2 MFC set to  0.000000
3/14/2011	5:18:26 PM	BCl3 MFC set to  0.000000
3/14/2011	5:18:26 PM	PHl3 MFC set to  0.000000
3/14/2011	5:18:26 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:18:26 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:18:26 PM	Tube furnace set to 0
3/14/2011	5:18:27 PM	Run finished at 5:18 PM
3/14/2011	5:18:27 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	5:25:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	5:25:56 PM	Recipe started at 5:25 PM
3/14/2011	5:25:56 PM	Helium valve closed
3/14/2011	5:25:56 PM	H2 valve closed
3/14/2011	5:25:56 PM	BCl3 valve closed
3/14/2011	5:25:56 PM	PH3 valve closed
3/14/2011	5:25:56 PM	SiCl4 pre valve closed
3/14/2011	5:25:56 PM	SiCl4 post valve closed
3/14/2011	5:25:56 PM	Main Vac valve closed
3/14/2011	5:25:56 PM	Bubbler valve closed
3/14/2011	5:25:56 PM	Bypass valve opened
3/14/2011	5:25:56 PM	Helium MFC set to  0.000000
3/14/2011	5:25:56 PM	H2 MFC set to  0.000000
3/14/2011	5:25:56 PM	BCl3 MFC set to  0.000000
3/14/2011	5:25:56 PM	PHl3 MFC set to  0.000000
3/14/2011	5:25:56 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:25:56 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:25:57 PM	Tube furnace set to 0
3/14/2011	5:26:29 PM	Helium valve closed
3/14/2011	5:26:29 PM	H2 valve closed
3/14/2011	5:26:29 PM	BCl3 valve closed
3/14/2011	5:26:29 PM	PH3 valve closed
3/14/2011	5:26:29 PM	SiCl4 pre valve closed
3/14/2011	5:26:29 PM	SiCl4 post valve closed
3/14/2011	5:26:29 PM	Bubbler valve closed
3/14/2011	5:26:29 PM	Main Vac valve opened
3/14/2011	5:26:29 PM	Bypass valve opened
3/14/2011	5:26:29 PM	Helium MFC set to  0.000000
3/14/2011	5:26:29 PM	H2 MFC set to  0.000000
3/14/2011	5:26:29 PM	BCl3 MFC set to  0.000000
3/14/2011	5:26:29 PM	PHl3 MFC set to  0.000000
3/14/2011	5:26:29 PM	SiCl4 MFC set to  0.000000
3/14/2011	5:26:29 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	5:26:29 PM	Tube furnace set to 0
3/14/2011	5:26:29 PM	Run finished at 5:26 PM
3/14/2011	5:26:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	5:38:16 PM	Helium MFC set to  50.000000
3/14/2011	5:38:17 PM	Helium valve opened
3/14/2011	5:38:22 PM	Bypass valve closed
3/14/2011	5:42:34 PM	Tube furnace set to 100
3/14/2011	5:42:35 PM	Helium valve closed
3/14/2011	5:43:27 PM	Helium valve opened
3/14/2011	5:44:57 PM	Helium valve closed
3/14/2011	5:45:48 PM	Bypass valve opened
3/14/2011	5:46:00 PM	Helium valve opened
3/14/2011	5:46:04 PM	Tube furnace set to 0
3/14/2011	5:46:09 PM	Helium valve closed
3/14/2011	6:10:11 PM	Helium valve opened
3/14/2011	6:10:53 PM	Helium valve closed
3/14/2011	6:10:56 PM	Helium MFC set to  0.000000
3/14/2011	6:11:02 PM	Tube furnace set to 100
3/14/2011	6:12:06 PM	Helium valve opened
3/14/2011	6:12:09 PM	Helium MFC set to  50.000000
3/14/2011	6:12:30 PM	Helium MFC set to  50.000000
3/14/2011	6:12:33 PM	Helium MFC set to  0.000000
3/14/2011	6:12:34 PM	Helium valve closed
3/14/2011	6:12:35 PM	Bypass valve closed
3/14/2011	6:12:36 PM	Bypass valve opened
3/14/2011	6:14:06 PM	Recipe started at 6:14 PM
3/14/2011	6:14:06 PM	Helium valve closed
3/14/2011	6:14:06 PM	BCl3 valve closed
3/14/2011	6:14:06 PM	PH3 valve closed
3/14/2011	6:14:06 PM	SiCl4 pre valve closed
3/14/2011	6:14:06 PM	SiCl4 post valve closed
3/14/2011	6:14:06 PM	Main Vac valve closed
3/14/2011	6:14:06 PM	Bypass valve closed
3/14/2011	6:14:06 PM	Bubbler valve closed
3/14/2011	6:14:06 PM	H2 valve opened
3/14/2011	6:14:06 PM	Helium MFC set to  0.000000
3/14/2011	6:14:06 PM	H2 MFC set to  500.000000
3/14/2011	6:14:06 PM	BCl3 MFC set to  0.000000
3/14/2011	6:14:06 PM	PHl3 MFC set to  0.000000
3/14/2011	6:14:06 PM	SiCl4 MFC set to  0.000000
3/14/2011	6:14:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	6:14:06 PM	Tube furnace set to 200
3/14/2011	6:15:25 PM	Helium valve closed
3/14/2011	6:15:25 PM	BCl3 valve closed
3/14/2011	6:15:25 PM	PH3 valve closed
3/14/2011	6:15:25 PM	SiCl4 pre valve closed
3/14/2011	6:15:25 PM	SiCl4 post valve closed
3/14/2011	6:15:25 PM	Main Vac valve closed
3/14/2011	6:15:25 PM	Bypass valve closed
3/14/2011	6:15:25 PM	H2 valve opened
3/14/2011	6:15:25 PM	Bubbler valve opened
3/14/2011	6:15:25 PM	Helium MFC set to  0.000000
3/14/2011	6:15:25 PM	H2 MFC set to  400.000000
3/14/2011	6:15:25 PM	BCl3 MFC set to  0.000000
3/14/2011	6:15:25 PM	PHl3 MFC set to  0.000000
3/14/2011	6:15:25 PM	SiCl4 MFC set to  0.000000
3/14/2011	6:15:25 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	6:15:25 PM	Tube furnace set to 1001
3/14/2011	6:37:05 PM	Helium valve closed
3/14/2011	6:37:05 PM	PH3 valve closed
3/14/2011	6:37:05 PM	Main Vac valve closed
3/14/2011	6:37:05 PM	Bypass valve closed
3/14/2011	6:37:05 PM	H2 valve opened
3/14/2011	6:37:05 PM	BCl3 valve opened
3/14/2011	6:37:05 PM	SiCl4 pre valve opened
3/14/2011	6:37:05 PM	SiCl4 post valve opened
3/14/2011	6:37:05 PM	Bubbler valve opened
3/14/2011	6:37:05 PM	Helium MFC set to  0.000000
3/14/2011	6:37:05 PM	H2 MFC set to  500.000000
3/14/2011	6:37:05 PM	BCl3 MFC set to  3.000000
3/14/2011	6:37:05 PM	PHl3 MFC set to  0.000000
3/14/2011	6:37:05 PM	SiCl4 MFC set to  55.000000
3/14/2011	6:37:05 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	6:37:06 PM	Tube furnace set to 1001
3/14/2011	6:54:06 PM	Helium valve closed
3/14/2011	6:54:06 PM	BCl3 valve closed
3/14/2011	6:54:06 PM	PH3 valve closed
3/14/2011	6:54:06 PM	SiCl4 pre valve closed
3/14/2011	6:54:06 PM	SiCl4 post valve closed
3/14/2011	6:54:06 PM	Main Vac valve closed
3/14/2011	6:54:06 PM	Bypass valve closed
3/14/2011	6:54:06 PM	H2 valve opened
3/14/2011	6:54:06 PM	Bubbler valve opened
3/14/2011	6:54:06 PM	Helium MFC set to  0.000000
3/14/2011	6:54:06 PM	H2 MFC set to  500.000000
3/14/2011	6:54:06 PM	BCl3 MFC set to  0.000000
3/14/2011	6:54:06 PM	PHl3 MFC set to  0.000000
3/14/2011	6:54:06 PM	SiCl4 MFC set to  0.000000
3/14/2011	6:54:06 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	6:54:06 PM	Tube furnace set to 0
3/14/2011	6:56:59 PM	H2 valve closed
3/14/2011	6:56:59 PM	BCl3 valve closed
3/14/2011	6:56:59 PM	PH3 valve closed
3/14/2011	6:56:59 PM	SiCl4 pre valve closed
3/14/2011	6:56:59 PM	SiCl4 post valve closed
3/14/2011	6:56:59 PM	Main Vac valve closed
3/14/2011	6:56:59 PM	Bypass valve closed
3/14/2011	6:56:59 PM	Helium valve opened
3/14/2011	6:56:59 PM	Bubbler valve opened
3/14/2011	6:56:59 PM	Helium MFC set to  400.000000
3/14/2011	6:56:59 PM	H2 MFC set to  0.000000
3/14/2011	6:56:59 PM	BCl3 MFC set to  0.000000
3/14/2011	6:56:59 PM	PHl3 MFC set to  0.000000
3/14/2011	6:56:59 PM	SiCl4 MFC set to  0.000000
3/14/2011	6:56:59 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	6:56:59 PM	Tube furnace set to 0
3/14/2011	7:20:19 PM	Helium valve closed
3/14/2011	7:20:19 PM	H2 valve closed
3/14/2011	7:20:19 PM	BCl3 valve closed
3/14/2011	7:20:19 PM	PH3 valve closed
3/14/2011	7:20:19 PM	SiCl4 pre valve closed
3/14/2011	7:20:19 PM	SiCl4 post valve closed
3/14/2011	7:20:19 PM	Main Vac valve closed
3/14/2011	7:20:19 PM	Bypass valve closed
3/14/2011	7:20:19 PM	Bubbler valve closed
3/14/2011	7:20:19 PM	Helium MFC set to  0.000000
3/14/2011	7:20:19 PM	H2 MFC set to  0.000000
3/14/2011	7:20:19 PM	BCl3 MFC set to  0.000000
3/14/2011	7:20:19 PM	PHl3 MFC set to  0.000000
3/14/2011	7:20:19 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:20:19 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:20:19 PM	Tube furnace set to 0
3/14/2011	7:20:19 PM	Run finished at 7:20 PM
3/14/2011	7:43:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	7:43:47 PM	Recipe started at 7:43 PM
3/14/2011	7:43:47 PM	Helium valve closed
3/14/2011	7:43:47 PM	H2 valve closed
3/14/2011	7:43:47 PM	BCl3 valve closed
3/14/2011	7:43:47 PM	PH3 valve closed
3/14/2011	7:43:47 PM	SiCl4 pre valve closed
3/14/2011	7:43:47 PM	SiCl4 post valve closed
3/14/2011	7:43:47 PM	Main Vac valve closed
3/14/2011	7:43:47 PM	Bubbler valve closed
3/14/2011	7:43:47 PM	Bypass valve opened
3/14/2011	7:43:47 PM	Helium MFC set to  0.000000
3/14/2011	7:43:47 PM	H2 MFC set to  0.000000
3/14/2011	7:43:47 PM	BCl3 MFC set to  0.000000
3/14/2011	7:43:47 PM	PHl3 MFC set to  0.000000
3/14/2011	7:43:47 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:43:47 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:43:47 PM	Tube furnace set to 0
3/14/2011	7:44:10 PM	Helium valve closed
3/14/2011	7:44:10 PM	H2 valve closed
3/14/2011	7:44:10 PM	BCl3 valve closed
3/14/2011	7:44:10 PM	PH3 valve closed
3/14/2011	7:44:10 PM	SiCl4 pre valve closed
3/14/2011	7:44:10 PM	SiCl4 post valve closed
3/14/2011	7:44:10 PM	Bubbler valve closed
3/14/2011	7:44:10 PM	Main Vac valve opened
3/14/2011	7:44:10 PM	Bypass valve opened
3/14/2011	7:44:10 PM	Helium MFC set to  0.000000
3/14/2011	7:44:10 PM	H2 MFC set to  0.000000
3/14/2011	7:44:10 PM	BCl3 MFC set to  0.000000
3/14/2011	7:44:10 PM	PHl3 MFC set to  0.000000
3/14/2011	7:44:10 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:44:10 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:44:10 PM	Tube furnace set to 0
3/14/2011	7:44:11 PM	Run finished at 7:44 PM
3/14/2011	7:44:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	7:45:38 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	7:45:39 PM	Recipe started at 7:45 PM
3/14/2011	7:45:39 PM	H2 valve closed
3/14/2011	7:45:39 PM	BCl3 valve closed
3/14/2011	7:45:39 PM	PH3 valve closed
3/14/2011	7:45:39 PM	SiCl4 pre valve closed
3/14/2011	7:45:39 PM	SiCl4 post valve closed
3/14/2011	7:45:39 PM	Main Vac valve closed
3/14/2011	7:45:39 PM	Bypass valve closed
3/14/2011	7:45:39 PM	Bubbler valve closed
3/14/2011	7:45:39 PM	Helium valve opened
3/14/2011	7:45:39 PM	Helium MFC set to  500.000000
3/14/2011	7:45:39 PM	H2 MFC set to  0.000000
3/14/2011	7:45:39 PM	BCl3 MFC set to  0.000000
3/14/2011	7:45:39 PM	PHl3 MFC set to  0.000000
3/14/2011	7:45:39 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:45:39 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:45:39 PM	Tube furnace set to 0
3/14/2011	7:46:55 PM	Helium valve closed
3/14/2011	7:46:55 PM	H2 valve closed
3/14/2011	7:46:55 PM	BCl3 valve closed
3/14/2011	7:46:55 PM	PH3 valve closed
3/14/2011	7:46:55 PM	SiCl4 pre valve closed
3/14/2011	7:46:55 PM	SiCl4 post valve closed
3/14/2011	7:46:55 PM	Main Vac valve closed
3/14/2011	7:46:55 PM	Bypass valve closed
3/14/2011	7:46:55 PM	Bubbler valve closed
3/14/2011	7:46:55 PM	Helium MFC set to  0.000000
3/14/2011	7:46:55 PM	H2 MFC set to  0.000000
3/14/2011	7:46:55 PM	BCl3 MFC set to  0.000000
3/14/2011	7:46:55 PM	PHl3 MFC set to  0.000000
3/14/2011	7:46:55 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:46:55 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:46:55 PM	Tube furnace set to 0
3/14/2011	7:46:55 PM	Run finished at 7:46 PM
3/14/2011	7:46:55 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	7:49:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	7:49:19 PM	Recipe started at 7:49 PM
3/14/2011	7:49:19 PM	Helium valve closed
3/14/2011	7:49:19 PM	H2 valve closed
3/14/2011	7:49:19 PM	BCl3 valve closed
3/14/2011	7:49:19 PM	PH3 valve closed
3/14/2011	7:49:19 PM	SiCl4 pre valve closed
3/14/2011	7:49:19 PM	SiCl4 post valve closed
3/14/2011	7:49:19 PM	Main Vac valve closed
3/14/2011	7:49:19 PM	Bubbler valve closed
3/14/2011	7:49:19 PM	Bypass valve opened
3/14/2011	7:49:19 PM	Helium MFC set to  0.000000
3/14/2011	7:49:19 PM	H2 MFC set to  0.000000
3/14/2011	7:49:19 PM	BCl3 MFC set to  0.000000
3/14/2011	7:49:19 PM	PHl3 MFC set to  0.000000
3/14/2011	7:49:19 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:49:19 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:49:19 PM	Tube furnace set to 0
3/14/2011	7:49:50 PM	Helium valve closed
3/14/2011	7:49:50 PM	H2 valve closed
3/14/2011	7:49:50 PM	BCl3 valve closed
3/14/2011	7:49:50 PM	PH3 valve closed
3/14/2011	7:49:50 PM	SiCl4 pre valve closed
3/14/2011	7:49:50 PM	SiCl4 post valve closed
3/14/2011	7:49:50 PM	Bubbler valve closed
3/14/2011	7:49:50 PM	Main Vac valve opened
3/14/2011	7:49:50 PM	Bypass valve opened
3/14/2011	7:49:50 PM	Helium MFC set to  0.000000
3/14/2011	7:49:50 PM	H2 MFC set to  0.000000
3/14/2011	7:49:50 PM	BCl3 MFC set to  0.000000
3/14/2011	7:49:50 PM	PHl3 MFC set to  0.000000
3/14/2011	7:49:50 PM	SiCl4 MFC set to  0.000000
3/14/2011	7:49:50 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	7:49:50 PM	Tube furnace set to 0
3/14/2011	7:49:50 PM	Run finished at 7:49 PM
3/14/2011	7:49:50 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	8:55:50 PM	Helium valve opened
3/14/2011	8:55:55 PM	Helium MFC set to  50.000000
3/14/2011	8:57:31 PM	Helium MFC set to  0.000000
3/14/2011	8:57:32 PM	Helium valve closed
3/14/2011	8:58:38 PM	Tube furnace set to 100
3/14/2011	9:00:16 PM	Recipe started at 9:00 PM
3/14/2011	9:00:17 PM	Helium valve closed
3/14/2011	9:00:17 PM	BCl3 valve closed
3/14/2011	9:00:17 PM	PH3 valve closed
3/14/2011	9:00:17 PM	SiCl4 pre valve closed
3/14/2011	9:00:17 PM	SiCl4 post valve closed
3/14/2011	9:00:17 PM	Main Vac valve closed
3/14/2011	9:00:17 PM	Bypass valve closed
3/14/2011	9:00:17 PM	Bubbler valve closed
3/14/2011	9:00:17 PM	H2 valve opened
3/14/2011	9:00:17 PM	Helium MFC set to  0.000000
3/14/2011	9:00:17 PM	H2 MFC set to  500.000000
3/14/2011	9:00:17 PM	BCl3 MFC set to  0.000000
3/14/2011	9:00:17 PM	PHl3 MFC set to  0.000000
3/14/2011	9:00:17 PM	SiCl4 MFC set to  0.000000
3/14/2011	9:00:17 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:00:17 PM	Tube furnace set to 200
3/14/2011	9:01:37 PM	Helium valve closed
3/14/2011	9:01:37 PM	BCl3 valve closed
3/14/2011	9:01:37 PM	PH3 valve closed
3/14/2011	9:01:37 PM	SiCl4 pre valve closed
3/14/2011	9:01:37 PM	SiCl4 post valve closed
3/14/2011	9:01:37 PM	Main Vac valve closed
3/14/2011	9:01:37 PM	Bypass valve closed
3/14/2011	9:01:37 PM	H2 valve opened
3/14/2011	9:01:37 PM	Bubbler valve opened
3/14/2011	9:01:37 PM	Helium MFC set to  0.000000
3/14/2011	9:01:37 PM	H2 MFC set to  400.000000
3/14/2011	9:01:37 PM	BCl3 MFC set to  0.000000
3/14/2011	9:01:37 PM	PHl3 MFC set to  0.000000
3/14/2011	9:01:37 PM	SiCl4 MFC set to  0.000000
3/14/2011	9:01:37 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:01:37 PM	Tube furnace set to 1001
3/14/2011	9:24:17 PM	Helium valve closed
3/14/2011	9:24:17 PM	PH3 valve closed
3/14/2011	9:24:17 PM	Main Vac valve closed
3/14/2011	9:24:17 PM	Bypass valve closed
3/14/2011	9:24:17 PM	H2 valve opened
3/14/2011	9:24:17 PM	BCl3 valve opened
3/14/2011	9:24:17 PM	SiCl4 pre valve opened
3/14/2011	9:24:17 PM	SiCl4 post valve opened
3/14/2011	9:24:17 PM	Bubbler valve opened
3/14/2011	9:24:17 PM	Helium MFC set to  0.000000
3/14/2011	9:24:17 PM	H2 MFC set to  500.000000
3/14/2011	9:24:17 PM	BCl3 MFC set to  3.300000
3/14/2011	9:24:17 PM	PHl3 MFC set to  0.000000
3/14/2011	9:24:17 PM	SiCl4 MFC set to  50.000000
3/14/2011	9:24:17 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:24:17 PM	Tube furnace set to 1001
3/14/2011	9:42:17 PM	Helium valve closed
3/14/2011	9:42:17 PM	BCl3 valve closed
3/14/2011	9:42:17 PM	PH3 valve closed
3/14/2011	9:42:17 PM	SiCl4 pre valve closed
3/14/2011	9:42:17 PM	SiCl4 post valve closed
3/14/2011	9:42:17 PM	Main Vac valve closed
3/14/2011	9:42:17 PM	Bypass valve closed
3/14/2011	9:42:17 PM	H2 valve opened
3/14/2011	9:42:17 PM	Bubbler valve opened
3/14/2011	9:42:17 PM	Helium MFC set to  0.000000
3/14/2011	9:42:17 PM	H2 MFC set to  500.000000
3/14/2011	9:42:17 PM	BCl3 MFC set to  0.000000
3/14/2011	9:42:17 PM	PHl3 MFC set to  0.000000
3/14/2011	9:42:17 PM	SiCl4 MFC set to  0.000000
3/14/2011	9:42:17 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:42:17 PM	Tube furnace set to 0
3/14/2011	9:45:11 PM	H2 valve closed
3/14/2011	9:45:11 PM	BCl3 valve closed
3/14/2011	9:45:11 PM	PH3 valve closed
3/14/2011	9:45:11 PM	SiCl4 pre valve closed
3/14/2011	9:45:11 PM	SiCl4 post valve closed
3/14/2011	9:45:11 PM	Main Vac valve closed
3/14/2011	9:45:11 PM	Bypass valve closed
3/14/2011	9:45:11 PM	Helium valve opened
3/14/2011	9:45:11 PM	Bubbler valve opened
3/14/2011	9:45:11 PM	Helium MFC set to  400.000000
3/14/2011	9:45:11 PM	H2 MFC set to  0.000000
3/14/2011	9:45:11 PM	BCl3 MFC set to  0.000000
3/14/2011	9:45:11 PM	PHl3 MFC set to  0.000000
3/14/2011	9:45:11 PM	SiCl4 MFC set to  0.000000
3/14/2011	9:45:11 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	9:45:12 PM	Tube furnace set to 0
3/14/2011	10:08:32 PM	Helium valve closed
3/14/2011	10:08:32 PM	H2 valve closed
3/14/2011	10:08:32 PM	BCl3 valve closed
3/14/2011	10:08:32 PM	PH3 valve closed
3/14/2011	10:08:32 PM	SiCl4 pre valve closed
3/14/2011	10:08:32 PM	SiCl4 post valve closed
3/14/2011	10:08:32 PM	Main Vac valve closed
3/14/2011	10:08:32 PM	Bypass valve closed
3/14/2011	10:08:32 PM	Bubbler valve closed
3/14/2011	10:08:32 PM	Helium MFC set to  0.000000
3/14/2011	10:08:32 PM	H2 MFC set to  0.000000
3/14/2011	10:08:32 PM	BCl3 MFC set to  0.000000
3/14/2011	10:08:32 PM	PHl3 MFC set to  0.000000
3/14/2011	10:08:32 PM	SiCl4 MFC set to  0.000000
3/14/2011	10:08:32 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:08:32 PM	Tube furnace set to 0
3/14/2011	10:08:32 PM	Run finished at 10:08 PM
3/14/2011	10:27:31 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	10:27:32 PM	Recipe started at 10:27 PM
3/14/2011	10:27:32 PM	H2 valve closed
3/14/2011	10:27:32 PM	BCl3 valve closed
3/14/2011	10:27:32 PM	PH3 valve closed
3/14/2011	10:27:32 PM	SiCl4 pre valve closed
3/14/2011	10:27:32 PM	SiCl4 post valve closed
3/14/2011	10:27:32 PM	Main Vac valve closed
3/14/2011	10:27:32 PM	Bypass valve closed
3/14/2011	10:27:32 PM	Bubbler valve closed
3/14/2011	10:27:32 PM	Helium valve opened
3/14/2011	10:27:32 PM	Helium MFC set to  500.000000
3/14/2011	10:27:32 PM	H2 MFC set to  0.000000
3/14/2011	10:27:32 PM	BCl3 MFC set to  0.000000
3/14/2011	10:27:32 PM	PHl3 MFC set to  0.000000
3/14/2011	10:27:32 PM	SiCl4 MFC set to  0.000000
3/14/2011	10:27:32 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:27:32 PM	Tube furnace set to 0
3/14/2011	10:27:36 PM	Helium valve closed
3/14/2011	10:27:36 PM	H2 valve closed
3/14/2011	10:27:36 PM	BCl3 valve closed
3/14/2011	10:27:36 PM	PH3 valve closed
3/14/2011	10:27:36 PM	SiCl4 pre valve closed
3/14/2011	10:27:36 PM	SiCl4 post valve closed
3/14/2011	10:27:36 PM	Main Vac valve closed
3/14/2011	10:27:36 PM	Bypass valve closed
3/14/2011	10:27:36 PM	Bubbler valve closed
3/14/2011	10:27:36 PM	Helium MFC set to  0.000000
3/14/2011	10:27:36 PM	H2 MFC set to  0.000000
3/14/2011	10:27:36 PM	BCl3 MFC set to  0.000000
3/14/2011	10:27:36 PM	PHl3 MFC set to  0.000000
3/14/2011	10:27:36 PM	SiCl4 MFC set to  0.000000
3/14/2011	10:27:36 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:27:36 PM	Tube furnace set to 0
3/14/2011	10:27:36 PM	Run finished at 10:27 PM
3/14/2011	10:27:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
3/14/2011	10:30:07 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
3/14/2011	10:30:08 PM	Recipe started at 10:30 PM
3/14/2011	10:30:08 PM	Helium valve closed
3/14/2011	10:30:08 PM	H2 valve closed
3/14/2011	10:30:08 PM	BCl3 valve closed
3/14/2011	10:30:08 PM	PH3 valve closed
3/14/2011	10:30:08 PM	SiCl4 pre valve closed
3/14/2011	10:30:08 PM	SiCl4 post valve closed
3/14/2011	10:30:08 PM	Main Vac valve closed
3/14/2011	10:30:08 PM	Bubbler valve closed
3/14/2011	10:30:08 PM	Bypass valve opened
3/14/2011	10:30:08 PM	Helium MFC set to  0.000000
3/14/2011	10:30:08 PM	H2 MFC set to  0.000000
3/14/2011	10:30:08 PM	BCl3 MFC set to  0.000000
3/14/2011	10:30:08 PM	PHl3 MFC set to  0.000000
3/14/2011	10:30:08 PM	SiCl4 MFC set to  0.000000
3/14/2011	10:30:08 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:30:08 PM	Tube furnace set to 0
3/14/2011	10:30:40 PM	Helium valve closed
3/14/2011	10:30:40 PM	H2 valve closed
3/14/2011	10:30:40 PM	BCl3 valve closed
3/14/2011	10:30:40 PM	PH3 valve closed
3/14/2011	10:30:40 PM	SiCl4 pre valve closed
3/14/2011	10:30:40 PM	SiCl4 post valve closed
3/14/2011	10:30:40 PM	Bubbler valve closed
3/14/2011	10:30:40 PM	Main Vac valve opened
3/14/2011	10:30:40 PM	Bypass valve opened
3/14/2011	10:30:40 PM	Helium MFC set to  0.000000
3/14/2011	10:30:40 PM	H2 MFC set to  0.000000
3/14/2011	10:30:40 PM	BCl3 MFC set to  0.000000
3/14/2011	10:30:40 PM	PHl3 MFC set to  0.000000
3/14/2011	10:30:40 PM	SiCl4 MFC set to  0.000000
3/14/2011	10:30:40 PM	Bypass solenoid MFC set to  0.000000
3/14/2011	10:30:40 PM	Tube furnace set to 0
3/14/2011	10:30:40 PM	Run finished at 10:30 PM
3/14/2011	10:30:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
